We engineer and investigate the interface electronic properties and chemistry at the front-side TCO electrodes (e.g., indium tin oxide (ITO) and ZnO) as well as at the metal back-side electrodes (e.g., Ag, Mg-Ag) in metal phthalocyanine (MePc)/C60 organic solar cells (OSCs). The absorber thin films were processed by a new Organic Vapor Phase Deposition (OVPD). The device architectures were developed for conventional as well as for inverted structures. Conventional photovoltaic devices were prepared on planar ITO and ZnO on glass transparent substrates, while the inverted solar cells were additionally processed on highly structured by ZnO-nanorods (ZnO-NRs) TCO surfaces. The work function of electrodes was adjusted in each specific case either by surface conditioning [1] or by use of alloy layers [2], or by application of new buffer layers from transition metal oxides [3]. The chemical and structural properties of the electrode/absorber interface was investigated by element depth profiling using secondary ion mass spectrometry (SIMS), grazing incidence x-ray diffraction analysis (GI-XRD) and x-ray photoelectron spectroscopy (XPS). As prepared solar cells with conventional architecture on planar TCO-electrodes show power conversion efficiencies of up to 4.5% under an illumination of 100 mW/cm2 and 25°C. Efficiencies of 3.1% are demonstrated on inverted planar PV devices. First solar cells with ZnO-NRs show efficiencies of 2.8%, which is the best result for this kind of hybrid devices. The findings of this work are discussed against the background of the performance and electrical properties of respective MePc/C60-based organic solar cells.