Electrochemical micromachining can remove electrically conductive materials with the transferring of ions, so that high precision is achievable. A novel method for fabricating high aspect ratio microstructures by electrochemical micromachining using vibratile tungsten wire was proposed in this paper. The slight vibration of tungsten wire can improve the machining stability. The relations between the machining accuracy and machining parameters were experimentally studied. Micro groove with the width of 15 μm was machined, and micro sharp angles structure with aspect ratio of 10 was obtained experimentally.