Electrochemical formation of nanostructural functional coatings for microelectronics
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2020-02-05 14:51
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BERSIROVA, Oksana, KUBLANOVSKY, Valeriy. Electrochemical formation of nanostructural functional coatings for microelectronics. In: Achievements and perspectives of modern chemistry, 9-11 octombrie 2019, Chişinău. Chisinau, Republic of Moldova: Tipografia Academiei de Ştiinţe a Moldovei, 2019, p. 77. ISBN 978-9975-62-428-2.
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Achievements and perspectives of modern chemistry 2019
Conferința "International Conference "Achievements and perspectives of modern chemistry""
Chişinău, Moldova, 9-11 octombrie 2019

Electrochemical formation of nanostructural functional coatings for microelectronics


Pag. 77-77

Bersirova Oksana, Kublanovsky Valeriy
 
Vernadsky Institute of General and Inorganic Chemistry NAS Ukraine
 
 
Disponibil în IBN: 4 noiembrie 2019


Rezumat

The work deals with the solution of the fundamental problem of the modern electroplating technology of functional materials by the controlled synthesis of metal silver and gold coatings with tailor-made properties for microelectronics. The range of the stable process of functional deposition (minimal dynamic instability of the system) (the electrochemical resistance is 4RT/anFjlim under polarization with current j=0.4/0.6jlim) where the most favourable energetic of preferential crystal face growth at the minimal work of surface formation is realized, has been determined; this allows one to obtain in any electrolyte deposits of electrolytic gold and silver whose physicochemical properties are stable. A new law governing electrochemical kinetics has been established: the discharge of different coordination silver (I) and gold (I) ions occurs by a common mechanism. A selfconsistent parameter, which is the electrochemical resistance of a system, the nature of complex ion and electroactive complex (EAC) formation conditions, is proposed as a correlation parameter for the prediction of the functional properties of silver and gold coatings. New engineering solutions have been found: alternative ways of replacing contact gold by alloys based on refractory metals with iron subgroup metals have been developed; a new selective method for the electrochemical regeneration of silver has been developed; electrolytes have been optimized (the electrolyte composition, the nature of EAC, the range of stable electrodeposition, electrolysis conditions have been justified); the problems of contact exchange, passivation of anodes, increasing the service life of buffer electrolytes have been solved; these electrolytes have been introduced in technologies for the deposition of conducting contact layer of gold, silver, tungsten and molybdenum alloys and competitive articles of micro- and nanoelectronics with considerable (up to 15%) reduction of rejected products [1-5].