An ultra high vacuum probe station has been designed for a wide range of electrophysical characterizations of individual nanostructures and nanostructure devices. The micro and nanostructures can be studied at different temperatures under vacuum and in a controllable gas environment. The surface of these nanostructures can be functionalized in situ with different catalysts; thus, the performance of the same nanostructure before and after functionalization can be compared directly. The system allows the nanostructures to be treated in situ with electron, ion, and photon (IR–UV range) beams for controlled defect formation, cleaning, and photochemical studies. The potential capabilities of this probe station were demonstrated using pristine and functionalized SnO2, In2O3, and TiO2 nanostructures.