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 SM ISO690:2012PANASYUK, Lev, CHAPURIN, Igor, ISHIMOV, Victor, SIDORINA, Svetlana. Using of vitreous chalcogenide semiconductors in microelectronic fabrication. In: Proceedings of SPIE - The International Society for Optical Engineering, Ed. 17, 19-23 august 1996, Taejon. Bellingham, Washington: SPIE, 1996, Ediția 17, Vol.2778, Part 1, pp. 115-116. ISBN 978-081942164-7. ISSN 0277-786X. DOI: https://doi.org/10.1117/12.2298941 |
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 Proceedings of SPIE - The International Society for Optical Engineering Ediția 17, Vol.2778, Part 1, 1996 |
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Congresul "Optics for Science and New Technology" 17, Taejon, Corea de Sud, 19-23 august 1996 | ||||||
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| DOI:https://doi.org/10.1117/12.2298941 | ||||||
| Pag. 115-116 | ||||||
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This report describes the application of thin film Vitreous Chalrogenide Semiconductors (VCS) for high resolution recording of the integrated elements. The processes of selective chemical etching of VCS layers are investigated both of the exposure conditions and parameter of etching solution. |
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| Cuvinte-cheie Engineering controlled terms Etching, Microelectronic processing, Microelectronics Engineering uncontrolled terms Chemical etching, Etching solutions, Exposure conditions, high resolution, Integrated elements, Microelectronic fabrication, Vitreous chalcogenide semiconductors Engineering main heading Optics |
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