Self-induced oscillation of the macropore diameter in n-type silicon
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COJOCARU, Ala, CARSTENSEN, Juergen, LEISNER, Malte, FOLL, Helmut, TIGINYANU, Ion. Self-induced oscillation of the macropore diameter in n-type silicon. In: Physica Status Solidi (C) Current Topics in Solid State Physics, 2009, vol. 6, pp. 1533-1535. ISSN 1862-6351. DOI: https://doi.org/10.1002/pssc.200881030
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Physica Status Solidi (C) Current Topics in Solid State Physics
Volumul 6 / 2009 / ISSN 1862-6351 /ISSNe 1610-1642

Self-induced oscillation of the macropore diameter in n-type silicon

DOI:https://doi.org/10.1002/pssc.200881030

Pag. 1533-1535

Cojocaru Ala1, Carstensen Juergen1, Leisner Malte1, Foll Helmut1, Tiginyanu Ion2
 
1 Institute for Material Science, Christian-Albrechts-University of Kiel,
2 National Center for Materials Study and Testing, Technical University of Moldova
 
 
Disponibil în IBN: 27 octombrie 2023


Rezumat

Electrochemical etching of n-type silicon in viscous-electrolyte containing HF for macropore formation has been employed to obtain deep pores at high growth rates. Under certain conditions, a new kind of macropore growth has been observed. The macropore diameters show self-induced antiphase oscillations during specific phases of pore growth. This remarkable structural feature is not only interesting by itself, it is also the manifestation of a steady state of pore growth, a feature which has not been observed in any kind of electro-chemically grown pores in semiconductors so far. This conclusion is mainly based on in-situ FFT (Fast Fourier Transform) voltage and illumination impedance spectroscopy measurements performed during the pore etching. Some voltage impedance data are presented here. Image Presented. 

Cuvinte-cheie
Antiphase oscillations, FFT (fast Fourier transform), High growth rate, Impedance data, Impedance spectroscopy measurements, In-situ, Macro pores, Macropore formation, N type silicon, Pore growth, Self-induced oscillations, Steady state, Structural feature