Optical and electron-beam recording of surface relief's using Ge5As37S58-Se nanomultilayers As registering media
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STRONSKI, Alexander, AKIMOVA, Elena, PAIUK, Oleksandr, MESHALKIN, Alexei, ABASHKIN, Vladimir, LYTVYN, Oksana, SERGEEV, Sergei, PRISAKAR, Alexandr, OLEKSENKO, Pavel F., TRIDUKH, Ghennadi. Optical and electron-beam recording of surface relief's using Ge5As37S58-Se nanomultilayers As registering media. In: Journal of Nano Research, 2016, nr. 39, pp. 96-104. ISSN 1662-5250. DOI: https://doi.org/10.4028/www.scientific.net/JNanoR.39.96
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Journal of Nano Research
Numărul 39 / 2016 / ISSN 1662-5250 /ISSNe 1661-9897

Optical and electron-beam recording of surface relief's using Ge5As37S58-Se nanomultilayers As registering media

DOI:https://doi.org/10.4028/www.scientific.net/JNanoR.39.96

Pag. 96-104

Stronski Alexander1, Akimova Elena2, Paiuk Oleksandr1, Meshalkin Alexei2, Abashkin Vladimir2, Lytvyn Oksana1, Sergeev Sergei2, Prisakar Alexandr2, Oleksenko Pavel F.1, Tridukh Ghennadi2
 
1 V.E. Lashkaryov Institute of Semiconductor Physics of the National Academy of Science of Ukraine,
2 Institute of Applied Physics, Academy of Sciences of Moldova
 
 
Disponibil în IBN: 21 ianuarie 2023


Rezumat

Processes of e-beam and holographic recording of surface-relief structures using Ge5As37S58-Se multilayer nanostructures as registering media were studied in this paper. Optical properties of Ge5As37S58, Se layers and Ge5As37S58-Se multilayer nanostructures were investigated. Spectral dependences of refractive index were analyzed within single-oscillator model. Values of optical band gaps for Ge5As37S58, Se layers and Ge5As37S58-Se multilayer nanostructures were obtained from Tauc dependences. Holographic recording process depends on the polarization of the recording beams. Using e-beam and holographic recording diffraction gratings and other elements were recorded in Ge5As37S58-Se multilayer nanostructures.

Cuvinte-cheie
Amorphous chalcogenide, e-beam recording, holographic recording, Multilayer nanostructures