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Ultima descărcare din IBN: 2023-11-12 17:26 |
SM ISO690:2012 CIOBANU, Vladimir, CECCONE, Giacomo, PLEŞCO (JIN), Irina, BRANISTE, Tudor, YE, Fei, FUMAGALLI, Francesco, COLPO, Pascal, DUTTA, Joydeep, LINNROS, Jan, TIGINYANU, Ion. Large-Sized Nanocrystalline Ultrathin β-Ga2 O3 Membranes Fabricated by Surface Charge Lithography. In: Nanomaterials, 2022, vol. 12, pp. 1-9. ISSN 2079-4991. DOI: https://doi.org/10.3390/nano12040689 |
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Nanomaterials | |||||||
Volumul 12 / 2022 / ISSN 2079-4991 /ISSNe 2079-4991 | |||||||
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DOI:https://doi.org/10.3390/nano12040689 | |||||||
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Large-sized 2D semiconductor materials have gained significant attention for their fascinat-ing properties in various applications. In this work, we demonstrate the fabrication of nanoperforated ultrathin β-Ga2 O3 membranes of a nanoscale thickness. The technological route includes the fabrication of GaN membranes using the Surface Charge Lithography (SCL) approach and subsequent thermal treatment in air at 900◦ C in order to obtain β-Ga2 O3 membranes. The as-grown GaN membranes were discovered to be completely transformed into β-Ga2 O3, with the morphology evolving from a smooth topography to a nanoperforated surface consisting of nanograin structures. The oxidation mechanism of the membrane was investigated under different annealing conditions followed by XPS, AFM, Raman and TEM analyses. |
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Cuvinte-cheie Phase transformation, Surface charge lithography, Ultrathin nanomembranes, β-Ga2 O3 |
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