Ozone sensing by In2O3 films modified with rh: Dimension effect

Korotchenkov Ghenadii; Nehasil Vaclav

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2022-02-23 11:38

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KOROTCHENKOV, Ghenadii, NEHASIL, Vaclav. Ozone sensing by In2O3 films modified with rh: Dimension effect. In: Sensors (Basel, Switzerland), 2021, nr. 5(21), pp. 1-12. ISSN 1424-8220. DOI: https://doi.org/10.3390/s21051886

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Sensors (Basel, Switzerland)

Numărul 5(21) / 2021 / ISSN 1424-8220

Ozone sensing by In_2^O3 films modified with rh: Dimension effect

DOI:https://doi.org/10.3390/s21051886

Pag. 1-12

Korotchenkov Ghenadii¹, Nehasil Vaclav²

¹ Moldova State University,
² Charles University, Prague

Disponibil în IBN: 30 martie 2021

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We considered the effect of coverage of the surface of In₂O₃ films with rhodium on the sensitivity of their electrophysical properties to ozone (1 ppm). The surface coverage with rhodium varied in the range of 0–0.1 ML. The In₂O₃ films deposited by spray pyrolysis had a thickness of 40–50 nm. The sensor response to ozone depends on the degree of rhodium coverage. This dependence has a pronounced maximum at a coverage of ~0.01 ML of Rh. An explanation is given for this effect. It is concluded that the observed changes are associated with the transition from the atomically dispersed state of rhodium to a 3D cluster state.

Cuvinte-cheie
adsorption, Atomic dispersion, clustering, Conductometric response, decomposition, modeling, surface modification

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