Advanced technological process for preparation of high quality superconducting Nb and ferromagnetic CuNi -alloy nanolayers of large area (~200 mm2) is developed based on DC-magnetron sputtering. Homogeneity and proper thickness of the layers were proved by the target-holder movement during the DC sputtering. Rutherford backscattering spectrometry used for precise thickness measurements. The proposed technology serves as a base for development of superconducting spintronic devices. The developed technology is patented and merited by the silver medal on the international exhibition “INFOINVENT-2007”