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 SM ISO690:2012БОРДУСОВ, С.. Классификация свч плазмотронов для производства изделий электронной техники. In: Электронная обработка материалов, 2002, nr. 1(38), pp. 79-82. ISSN 0013-5739. |
| EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
 Электронная обработка материалов |
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| Numărul 1(38) / 2002 / ISSN 0013-5739 /ISSNe 2345-1718 | ||||||
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| Pag. 79-82 | ||||||
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Classification of microwave plasmatrons used in the processes of electronic technique devices production is presented. It based on constructive peculiarities and technical features of microwave applicators. The proposed classification of microwave plasmatrons will be useful while projecting and chosing the type of microwave plasma source for certain technical purpose and also for studying and examination well–known constructions of that type plasma generators. |
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