MSP 41 P New developments in metal-organic deposition of oxides: atomic layer-by-layer growth of thin films and superlattices
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BALLANI, Camillo, HUHN, Sebastian, JUNGBAUER, Markus, MICHELMANN, Markus, MASSEL, F., SHAPOVAL, Oleg M., BELENCHUK, Alexandr, MOSHNYAGA, Vasily T.. MSP 41 P New developments in metal-organic deposition of oxides: atomic layer-by-layer growth of thin films and superlattices. In: Materials Science and Condensed Matter Physics, Ed. 6, 11-14 septembrie 2012, Chișinău. Chișinău, Republica Moldova: Institutul de Fizică Aplicată, 2012, Editia 6, p. 116. ISBN 978-9975-66-290-1.
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Materials Science and Condensed Matter Physics
Editia 6, 2012
Conferința "Materials Science and Condensed Matter Physics"
6, Chișinău, Moldova, 11-14 septembrie 2012

MSP 41 P New developments in metal-organic deposition of oxides: atomic layer-by-layer growth of thin films and superlattices


Pag. 116-116

Ballani Camillo1, Huhn Sebastian1, Jungbauer Markus1, Michelmann Markus1, Massel F.1, Shapoval Oleg M.2, Belenchuk Alexandr2, Moshnyaga Vasily T.1
 
1 Georg-August-Universitat-Gottingen,
2 Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu"
 
 
Disponibil în IBN: 19 martie 2020


Rezumat

Metal-organic aerosol deposition (MAD) technique1 was shown to be very advantageous in preparation of thin films of complex functional oxides, like cuprates, manganites, titanites. Due to their unique bulk and interfacial electronic/structural properties these strongly correlated oxides are recently in the focus of fundamental and applied research. We report here further MAD developments toward the in-situ growth control via optical ellipsometry and sub-unit cell level composition control of films and superlattices by deposition of atomic layers. Formation of Ruddlesden-Popper SrO(SrTiO3)n thin films with n = 4 will be presented as a direct demonstration of the atomic layer-by-layer deposition. The results on the structure and magnetotransport of individual atomic layer-by-layer grown thin films (LMO, LBMO, LSMO) as well as of superlattices (LCMO/PCMO, LBMO/LMO, LCMO/BTO) will be presented and discussed with the main focus on the optimization of colossal magnetoresistance and artificial multiferroic behavior by means of electronic and/or structural interface engineering. Financial support from EU FP 7 IFOX (interfacing oxides) and STCU project 5390 is acknowledged. [1] Appl. Phys. Lett. 74, 1842 (1999).