Currently, of considerable interest is the question of the formation of nanostructured elements on the surface of solids, which cause a significant change in the physical and chemical properties of the surface. The report presents fundamental and applied studies of physical and chemical processes in nanostructures aimed at establishing the fundamental relationships that determine the relationship of their nano-, micro- and macroparameters. The complex of completed studies includes analysis of the structure of nanoelements and the modified structure of the surface of a solid, the study of the physical and chemical processes occurring during the formation and operation of nanostructures based on mathematical modeling, analytical and numerical calculations, experimental studies. Several results of numerical simulation of some nanotechnological processes as formation of whiskers on the silicon surface, quantum points in silicon or in porous anodic aluminum oxide and composite layers with nanoparticles will be presented.