Kinetic characteristics of SnO2 thin film gas sensors for environmental monitoring
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KOROTCHENKOV, Ghenadii, BRYNZARI, Vladimir, DMITRIEV, Serghei. Kinetic characteristics of SnO2 thin film gas sensors for environmental monitoring. In: Proceedings of SPIE - The International Society for Optical Engineering, Ed. 1, 4-5 noiembrie 1998, Boston, Massachusetts. Bellingham, Washington: SPIE, 1998, Vol.3539, pp. 196-204. ISBN 0819430005. ISSN 0277-786X.
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Proceedings of SPIE - The International Society for Optical Engineering
Vol.3539, 1998
Conferința "Modern Optics"
1, Boston, Massachusetts, Statele Unite ale Americii, 4-5 noiembrie 1998

Kinetic characteristics of SnO2 thin film gas sensors for environmental monitoring


Pag. 196-204

Korotchenkov Ghenadii, Brynzari Vladimir, Dmitriev Serghei
 
Technical University of Moldova
 
 
Disponibil în IBN: 7 februarie 2024


Rezumat

In this report we presented results of gas sensitivity' kinetics analysis for undoped SnO2 thin films, deposited by spray pyrolysis method, using SnCl4x5H2O alcohol solution. The comparison of gas sensitivity's kinetics in measurement cycles air→{air+(0.08-1.7%)CO}→air and air→{N2+0.5%O2}→air for different thickness of SnO2 films (d = 40-200 nm) and operating temperature (T = 150-400 °C) was carried out. We have determined the kinetic parameters (τ and Eact) and made a conclusion that kinetics of gas sensitivity is limited by the rate of SnO2 surface refilling by oxygen.

Cuvinte-cheie
Engineering controlled terms Alcohols, pyrolysis, Reaction kinetics, Thin film devices, Tin compounds Engineering uncontrolled terms Gas sensitivity, Tin dioxide Engineering main heading Chemical sensors