Effect of Al Sn - Doping on properties of zinc oxide nanostructured films grown by magnetron sputtering
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GHIMPU, Lidia, TIGINYANU, Ion, LUPAN, Oleg, MISHRA, Yogendra Kumar, PAULOWICZ, Ingo, GEDAMU, Dawit M., COJOCARU, Ala, ADELUNG, Rainer. Effect of Al Sn - Doping on properties of zinc oxide nanostructured films grown by magnetron sputtering. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 36, 14-16 octombrie 2013, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2013, Ediția 36, pp. 133-136. ISBN 978-146735670-1. DOI: https://doi.org/10.1109/SMICND.2013.6688111
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Proceedings of the International Semiconductor Conference
Ediția 36, 2013
Conferința "36th International Semiconductor Conference"
36, Sinaia, Romania, 14-16 octombrie 2013

Effect of Al Sn - Doping on properties of zinc oxide nanostructured films grown by magnetron sputtering

DOI:https://doi.org/10.1109/SMICND.2013.6688111

Pag. 133-136

Ghimpu Lidia1, Tiginyanu Ion1, Lupan Oleg23, Mishra Yogendra Kumar2, Paulowicz Ingo2, Gedamu Dawit M.2, Cojocaru Ala2, Adelung Rainer2
 
1 Institute of Electronic Engineering and Industrial Technologies, Academy of Sciences of Moldova,
2 Institute for Material Science, Christian-Albrechts-University of Kiel,
3 Technical University of Moldova
 
 
Disponibil în IBN: 13 decembrie 2023


Rezumat

Metal doping in nanostructured zinc oxide is important for device applications. To obtain improved performances for practical applications, Aluminum (Al) and Tin (Sn)-doping in zinc oxide nanostructured layers were investigated. Samples were grown by magnetron sputtering and studied by X-ray diffraction (XRD), micro-Raman, scanning electron microscopy (SEM), and energy dispersive X-ray (EDX) techniques. It was observed that nanoparticles are interconnected and form porous network of individual nanoparticles. It is found clear evidence of changes of different properties after doping with aluminum or tin in zinc oxide nanostructured films grown by magnetron sputtering. 

Cuvinte-cheie
Aluminum (Al), Device application, Energy dispersive x-ray, Individual nanoparticles, Nano-structured layer, nanostructured films, Nanostructured zinc oxides, Porous networks