Hydrophobic ZnO used in EWOD technology and SAW devices for better bio-fluid slip at microchannel walls controlled by DC pulses

Sirbu Lilian; Ghimpu Lidia; Muller Raluca; Vodă Irina; Tiginyanu Ion; Ursachi Veaceslav; Dascălu Traian

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113

SM ISO690:2012

SIRBU, Lilian, GHIMPU, Lidia, MULLER, Raluca, VODĂ, Irina, TIGINYANU, Ion, URSACHI, Veaceslav, DASCĂLU, Traian. Hydrophobic ZnO used in EWOD technology and SAW devices for better bio-fluid slip at microchannel walls controlled by DC pulses. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 35, 15-17 octombrie 2012, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2012, Vol. 1, pp. 231-234. ISBN 978-146730736-9. DOI: https://doi.org/10.1109/SMICND.2012.6400645

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Proceedings of the International Semiconductor Conference
Vol. 1, 2012

Conferința " International Semiconductor Conference"
35, Sinaia, Romania, 15-17 octombrie 2012

Hydrophobic ZnO used in EWOD technology and SAW devices for better bio-fluid slip at microchannel walls controlled by DC pulses

DOI:https://doi.org/10.1109/SMICND.2012.6400645

Pag. 231-234

Sirbu Lilian¹, Ghimpu Lidia¹, Muller Raluca², Vodă Irina³, Tiginyanu Ion¹, Ursachi Veaceslav⁴, Dascălu Traian⁵

¹ Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu" of the Academy of Sciences of Moldova,
² National Institute for Research and Development in Microtechnologies ,
³ Institute of Chemistry of the Academy of Sciences of Moldova,
⁴ Institute of Applied Physics, Academy of Sciences of Moldova,
⁵ National Institute for Laser, Plasma and Radiation Physics (INFLPR)

Proiecte:

Menționat în lucrare: 10.820.05.23RoA Senzori bio-chimici bazaţi pe pelicule poroase de InP, polimeri şi nanoparicle metalice realizaţi cu tehnici MEMS/MOEMS pentru măsurători electrice şi optice în timp real

Menționat în lucrare: 12.819.15.20A Dispozitive emiţătoare de lumină în baza nanocopoziţilor organici şi anorganici

Menționat în lucrare: 266515 Preparation for Moldova's integration into the European Research Area and into the Community R&D Framework Programs on the basis of scientific excellence

Disponibil în IBN: 13 decembrie 2023

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Rezumat

In this paper, we will review the electrowetting on dielectric (EWOD) principles applied to microfluidic devices. We replaced the usually used teflon surface by ZnO transparent film in order to obtain a device with an optical weak absorption in the diapason ranged from VIS to far-MIR and THz waves. We studied the piezoelectric characteristics of ZnO films obtained by RF magnetron sputtering in Ar+O₂ plasma. ZnO films have been grown on SiO ₂/Si(100) substrate using a zinc oxide target. The morphological characteristics of the films were investigated by atomic force microscopy (AFM). We present the THz spectra from ZnO films.

Cuvinte-cheie
Acoustic surface wave devices, atomic force microscopy, magnetron sputtering, Metallic films, Saws, wetting, zinc oxide