Microsensor on single ZnO microwire
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CHAI, Guangyu, RUSU, Emil, CHOW, Lee, STRATAN, Gheorghe, HEINRICH, Helge H., PARK, Sang Hoon, SCHULTE, Alfons, LUPAN, Oleg, TROFIM, Viorel, RAILEAN, Sergey. Microsensor on single ZnO microwire. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 32, 11-14 octombrie 2009, San Antonio. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2009, Vol. 1, pp. 275-278. ISBN 978-142444413-7. DOI: https://doi.org/10.1109/SMICND.2009.5336549
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Proceedings of the International Semiconductor Conference
Vol. 1, 2009
Conferința " International Semiconductor Conference"
32, San Antonio, Statele Unite ale Americii, 11-14 octombrie 2009

Microsensor on single ZnO microwire

DOI:https://doi.org/10.1109/SMICND.2009.5336549

Pag. 275-278

Chai Guangyu1, Rusu Emil2, Chow Lee1, Stratan Gheorghe2, Heinrich Helge H.1, Park Sang Hoon1, Schulte Alfons1, Lupan Oleg13, Trofim Viorel3, Railean Sergey2
 
1 University of Central Florida,
2 Institute of Electronic Engineering and Industrial Technologies, Academy of Sciences of Moldova,
3 Technical University of Moldova
 
 
Disponibil în IBN: 11 decembrie 2023


Rezumat

For development of individual ZnO microwire in hydrogen sensors an environmentally benign synthesis process and fabrication route are required. Here we report a synthesis route for ZnO microwires using vapour phase process. Furthermore, our synthesis technique permits microwires to be transferred to other substrates. This offers the possibility of using focused ion beam instrument for handling. We fabricated a single microwire-based sensor and found ~ 4% sensitive hydrogen 200 ppm in the air at room temperature.

Cuvinte-cheie
hydrogen sensors, microwires, Vapour phase process, zinc oxide