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SM ISO690:2012 CHAI, Guangyu, RUSU, Emil, CHOW, Lee, STRATAN, Gheorghe, HEINRICH, Helge H., PARK, Sang Hoon, SCHULTE, Alfons, LUPAN, Oleg, TROFIM, Viorel, RAILEAN, Sergey. Microsensor on single ZnO microwire. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 32, 11-14 octombrie 2009, San Antonio. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2009, Vol. 1, pp. 275-278. ISBN 978-142444413-7. DOI: https://doi.org/10.1109/SMICND.2009.5336549 |
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Proceedings of the International Semiconductor Conference Vol. 1, 2009 |
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Conferința " International Semiconductor Conference" 32, San Antonio, Statele Unite ale Americii, 11-14 octombrie 2009 | ||||||
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DOI:https://doi.org/10.1109/SMICND.2009.5336549 | ||||||
Pag. 275-278 | ||||||
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For development of individual ZnO microwire in hydrogen sensors an environmentally benign synthesis process and fabrication route are required. Here we report a synthesis route for ZnO microwires using vapour phase process. Furthermore, our synthesis technique permits microwires to be transferred to other substrates. This offers the possibility of using focused ion beam instrument for handling. We fabricated a single microwire-based sensor and found ~ 4% sensitive hydrogen 200 ppm in the air at room temperature. |
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Cuvinte-cheie hydrogen sensors, microwires, Vapour phase process, zinc oxide |
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