ZnO micro/nano structures by MOCVD and vapour transport technique: Growth and characterization
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RUSU, Emil, BURLACU, Alexandru, URSACHI, Veaceslav, STRATAN, Gheorghe, PURICA, Munitzer, BUDIANU, Elena, MONAICO, Eduard. ZnO micro/nano structures by MOCVD and vapour transport technique: Growth and characterization. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 30, 15-17 octombrie 2007, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2007, Vol. 2, Ediția 30, pp. 327-330. ISBN 1424408474, 978-142440847-4. DOI: https://doi.org/10.1109/SMICND.2007.4519726
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Proceedings of the International Semiconductor Conference
Vol. 2, Ediția 30, 2007
Conferința "30th International Semiconductor Conference"
30, Sinaia, Romania, 15-17 octombrie 2007

ZnO micro/nano structures by MOCVD and vapour transport technique: Growth and characterization

DOI:https://doi.org/10.1109/SMICND.2007.4519726

Pag. 327-330

Rusu Emil1, Burlacu Alexandru1, Ursachi Veaceslav1, Stratan Gheorghe1, Purica Munitzer2, Budianu Elena2, Monaico Eduard3
 
1 Institute of Applied Physics, Academy of Sciences of Moldova,
2 National Institute for Research and Development in Microtechnologies ,
3 Technical University of Moldova
 
 
Disponibil în IBN: 25 noiembrie 2023


Rezumat

ZnO micro/nano structures were grown by metalo- organic chemical vapour deposition (MOCVD) and chemical vapour transport and condensation deposition process on Si and glass substrates. Using MOCVD method were grown uniform layers consisting of ZnO nanorods, or multilayer structures composed of nanorods and microrods arrays by the variation of the Ar carrier gas flow rate. A variety of hierarchical ZnO structures were grown on a textured ZnO layer using chemical vapour transport and condensation deposition process. Morphology, structural and optical properties of the obtained ZnO nanostructures are studied by means of scanning electron microscopy (SEM), X-ray diffraction (XRD) analysis and photoluminescence (PL). 

Cuvinte-cheie
Chemical vapour transport and condensation method, MOCVD, photoluminescence, SEM, XRD analysis, ZnO micro/nano structures