Rapid photothermal processing for silicon solar cells fabrication

Shishiyanu Sergiu; Singh R.; Shishiyanu Teodor; Lupan Oleg; Railean Sergey; Şargu Sergiu

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SHISHIYANU, Sergiu, SINGH, R., SHISHIYANU, Teodor, LUPAN, Oleg, RAILEAN, Sergey, ŞARGU, Sergiu. Rapid photothermal processing for silicon solar cells fabrication. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 29, 27-29 septembrie 2006, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2006, Vol. 1, Ediția 29, pp. 175-178. ISBN 1424401097, 978-142440109-3. DOI: https://doi.org/10.1109/SMICND.2006.283961

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Proceedings of the International Semiconductor Conference
Vol. 1, Ediția 29, 2006

Conferința "29th International Semiconductor Conference"
29, Sinaia, Romania, 27-29 septembrie 2006

Rapid photothermal processing for silicon solar cells fabrication

DOI:https://doi.org/10.1109/SMICND.2006.283961

Pag. 175-178

Shishiyanu Sergiu¹², Singh R.², Shishiyanu Teodor¹, Lupan Oleg¹, Railean Sergey¹, Şargu Sergiu¹

¹ Technical University of Moldova,
² Center for Silicon Nanoelectronics, Clemson University

Disponibil în IBN: 24 noiembrie 2023

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In our report we demonstrated the advantage of the Rapid Photothermal Processing (RPP) technology compare to conventional furnace technology for solar cells fabrication: short time, low thermal budget and low temperature processing, high heating-cooling rates. The n⁺-p-Si junctions were obtained from electrochemical deposited P source by Rapid Photothermal Processing enhanced diffusion for 16 s at 900°C and 1000°C. The emitter sheet resistivity decreased from 1100 Ω/sq, RPP duration 60 s to 340Ω/sq, RPP duration 200s at 999°C. The concentration profiles of P in Si after RPP enhanced diffusion were analyzed. The regime of emitter ohmic contact formation is RPP at 310V for 8-10s. The photoelectrical parameters of the obtained n⁺-p and p⁺-n-Si photovoltaic cell are respective FF=33%, η=4.1% and FF=40%, η=1.1%. The obtained results demonstrated that all steps of the n -p and p -n-Si solar cells fabrication can be realized by the Rapid Photothermal Processing technology.

Cuvinte-cheie
Concentration (process), electrochemistry, Low temperature phenomena, Parameter estimation, Polysilicon, Semiconductor junctions

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