Electrochemical pore etching in Ge
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LANGA, Sergiu, CHRISTOPHERSEN, Marc, CARSTENSEN, Juergen, TIGINYANU, Ion, FOLL, Helmut. Electrochemical pore etching in Ge. In: Physica Status Solidi (A) Applied Research, 2003, vol. 195, pp. 4-6. ISSN 0031-8965. DOI: https://doi.org/10.1002/pssa.200306456
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Physica Status Solidi (A) Applied Research
Volumul 195 / 2003 / ISSN 0031-8965 /ISSNe 1521-396X

Electrochemical pore etching in Ge

DOI:https://doi.org/10.1002/pssa.200306456

Pag. 4-6

Langa Sergiu12, Christophersen Marc1, Carstensen Juergen1, Tiginyanu Ion2, Foll Helmut1
 
1 Christian-Albrechts University of Kiel,
2 Technical University of Moldova
 
 
Disponibil în IBN: 20 noiembrie 2023


Rezumat

Nucleation and growth of electrochemically obtained pores on (111) and (100) oriented n-Ge in different electrolytes was investigated. On rough surfaces pore density increases as the current density increases, whereas on smooth surfaces the situation is inverse, i.e., the pore density increases as the current density decreases. The macropores show strong anisotropic features with a cone-like shape. This can be understood if the passivation of the pore walls in Ge is less pronounced as in the case of Si or HI-V compounds, but strongly anisotropic.

Cuvinte-cheie
Anisotropy, Crystal orientation, current density, electrochemistry, Electrolytes, etching, Nucleation, Passivation, porosity, Semiconductor growth, surface roughness