Combination Thermostated Vacuum Gauge
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BELOTSERKOVSKII, Igori, SIDORENKO, Anatolie, KONDRYA, Elena, SMYSLOV, Vladimir. Combination Thermostated Vacuum Gauge. In: IFMBE Proceedings: . 6th International Conference on Nanotechnologies and Biomedical Engineering , Ed. 6, 20-23 septembrie 2023, Chişinău. Chişinău: Springer Science and Business Media Deutschland GmbH, 2024, Ediția 6, Vol.91, pp. 574-581. ISBN 978-303142774-9. ISSN 16800737. DOI: https://doi.org/10.1007/978-3-031-42775-6_61
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IFMBE Proceedings
Ediția 6, Vol.91, 2024
Conferința "6th International Conference on Nanotechnologies and Biomedical Engineering"
6, Chişinău, Moldova, 20-23 septembrie 2023

Combination Thermostated Vacuum Gauge

DOI:https://doi.org/10.1007/978-3-031-42775-6_61

Pag. 574-581

Belotserkovskii Igori1, Sidorenko Anatolie2, Kondrya Elena2, Smyslov Vladimir2
 
1 Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu",
2 Ghitu Institute of Electronic Engineering and Nanotechnologies, TUM
 
 
Disponibil în IBN: 9 octombrie 2023


Rezumat

To expand the measured pressure range, a prototype of a CVG-3 combination vacuum gauge using different physical principles of pressure measurement has been developed and constructed; it includes an electronic controller and a specially designed TTD-2 deformation–thermoelectric combination transducer. The transducer includes thermoelectric and deformation sensors. The sensitive element of the thermoelectric sensor consists of an electrically insulating film with heating and measuring circuits formed on the film surface by vacuum deposition; the measuring circuit is an array of thermocouples. The use of a thin insulating film in constructing the sensitive element has made it possible to significantly expand the measured pressure range toward high vacuum. The sensitive element of the deformation sensor is a silicon chip with a thin membrane in the middle; a tensoresistive bridge is formed on the membrane surface. The decrease in the membrane thickness has made it possible to increase the sensitivity of the sensor at pressures below 1 Torr. To decrease the pressure measurement error depending on changes in ambient temperature, the sensors are thermostated. Each sensor has an individual thermostat. The use of the thermocouple and tensometric principles of pressure measurement has made it possible to expand the measured pressure range from deep vacuum to atmospheric pressure, while maintaining high measurement accuracy. The large overlap of the measurement ranges of the sensors has made it possible to exclude jumps in the vacuum gauge readings upon switching from one physical principle of pressure measurement to another. 

Cuvinte-cheie
Pressure measurement, Tensometric, Thermocouple, Vacuum gauge