Diffusion processes at the W-InP interface
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KOROTCHENKOV, Ghenadii, MICHAILOV, Victor. Diffusion processes at the W-InP interface. In: Semiconductor Science and Technology, 1996, vol. 11, pp. 1402-1404. ISSN 0268-1242. DOI: https://doi.org/10.1088/0268-1242/11/10/008
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Semiconductor Science and Technology
Volumul 11 / 1996 / ISSN 0268-1242

Diffusion processes at the W-InP interface

DOI:https://doi.org/10.1088/0268-1242/11/10/008

Pag. 1402-1404

Korotchenkov Ghenadii, Michailov Victor
 
Technical University of Moldova
 
 
Disponibil în IBN: 31 august 2023


Rezumat

In this paper we present the results of analysis of the electrophysical characteristics of W-n-InP contacts and of Auger spectra and Auger profiles of W-InP structures both before and after heat treatment. The mechanism of interface diffusion as well as the parameters necessary for its description were determined.

Cuvinte-cheie
Annealing, Auger electron spectroscopy, Current voltage characteristics, deposition, diffusion, Electric properties, Electron beams, evaporation, Interfaces (materials), physical properties, Semiconducting indium phosphide, tungsten