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SM ISO690:2012 HUBBARD, Seth M., PAVLIDIS, Dimitris, VALIAEV, V., STEVENS-KALCEFF, Marion A., TIGINYANU, Ion. Electrical characterization and cathodoluminescence microanalysis of AlN/GaN heterostructures. In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 2002, vol. 91-92, pp. 336-340. ISSN 0921-5107. DOI: https://doi.org/10.1016/S0921-5107(01)01045-5 |
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Materials Science and Engineering B: Solid-State Materials for Advanced Technology | ||||||
Volumul 91-92 / 2002 / ISSN 0921-5107 | ||||||
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DOI:https://doi.org/10.1016/S0921-5107(01)01045-5 | ||||||
Pag. 336-340 | ||||||
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Low-pressure MOCVD is used to grow AlN/GaN MIS-type heterostructures with AlN thickness between 3 and 35 nm. The two-dimensional electron gas (2DEG) Hall mobility was found to decrease with AlN thickness. The measured room temperature and 20 K mobilities for a sample with 15 nm thick AlN were 465 cm2V-1s-1 (ns = 1.72 × 1013 cm-2) and 877 cm2 V-1 s-1 (ns = 1.57 × 1013 cm-2), respectively. Cathodoluminescence (CL) spectra consist of two GaN-related bands with the maxima at 3.4 and 1.9-2.3 eV. Under surface excitation the intensity of the red-yellow CL relative to the intensity of the UV emission was found to increase with AlN film thickness. This increase was found to correlate with the decrease in 2DEG Hall mobility. |
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Cuvinte-cheie Aluminum nitride, atomic force microscopy, cathodoluminescence, Gallium nitride, Metal-insulator-semiconductor structures |
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DataCite XML Export
<?xml version='1.0' encoding='utf-8'?> <resource xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns='http://datacite.org/schema/kernel-3' xsi:schemaLocation='http://datacite.org/schema/kernel-3 http://schema.datacite.org/meta/kernel-3/metadata.xsd'> <identifier identifierType='DOI'>10.1016/S0921-5107(01)01045-5</identifier> <creators> <creator> <creatorName>Hubbard, S.</creatorName> <affiliation>University of Michigan, Statele Unite ale Americii</affiliation> </creator> <creator> <creatorName>Pavlidis, D.</creatorName> <affiliation>University of Michigan, Statele Unite ale Americii</affiliation> </creator> <creator> <creatorName>Valiaev, V.</creatorName> <affiliation>University of Michigan, Statele Unite ale Americii</affiliation> </creator> <creator> <creatorName>Stevens-Kalceff, M.</creatorName> <affiliation>University of New South Wales, Australia</affiliation> </creator> <creator> <creatorName>Tighineanu, I.M.</creatorName> <affiliation>Universitatea Tehnică a Moldovei, Moldova, Republica</affiliation> </creator> </creators> <titles> <title xml:lang='en'>Electrical characterization and cathodoluminescence microanalysis of AlN/GaN heterostructures</title> </titles> <publisher>Instrumentul Bibliometric National</publisher> <publicationYear>2002</publicationYear> <relatedIdentifier relatedIdentifierType='ISSN' relationType='IsPartOf'>0921-5107</relatedIdentifier> <subjects> <subject>Aluminum nitride</subject> <subject>atomic force microscopy</subject> <subject>cathodoluminescence</subject> <subject>Gallium nitride</subject> <subject>Metal-insulator-semiconductor structures</subject> </subjects> <dates> <date dateType='Issued'>2002-04-30</date> </dates> <resourceType resourceTypeGeneral='Text'>Journal article</resourceType> <descriptions> <description xml:lang='en' descriptionType='Abstract'><p>Low-pressure MOCVD is used to grow AlN/GaN MIS-type heterostructures with AlN thickness between 3 and 35 nm. The two-dimensional electron gas (2DEG) Hall mobility was found to decrease with AlN thickness. The measured room temperature and 20 K mobilities for a sample with 15 nm thick AlN were 465 cm<sup>2</sup>V<sup>-1</sup>s<sup>-1</sup> (n<sub>s</sub> = 1.72 × 10<sup>13</sup> cm<sup>-2</sup>) and 877 cm<sup>2</sup> V<sup>-1</sup> s<sup>-1</sup> (n<sub>s</sub> = 1.57 × 10<sup>13</sup> cm<sup>-2</sup>), respectively. Cathodoluminescence (CL) spectra consist of two GaN-related bands with the maxima at 3.4 and 1.9-2.3 eV. Under surface excitation the intensity of the red-yellow CL relative to the intensity of the UV emission was found to increase with AlN film thickness. This increase was found to correlate with the decrease in 2DEG Hall mobility.</p></description> </descriptions> <formats> <format>uri</format> </formats> </resource>