Fabrication of photonic crystal circuits based on GaN ultrathin membranes by maskless lithography
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VOLCIUC, Olesea, BRANISTE, Tudor, SERGENTU, Vladimir, URSACHI, Veaceslav, TIGINYANU, Ion, GUTOWSKI, Jurgen. Fabrication of photonic crystal circuits based on GaN ultrathin membranes by maskless lithography. In: Proceedings of SPIE - The International Society for Optical Engineering, Ed. 7, 4-6 mai 2015, Barcelona. Bellingham, Washington: SPIE, 2015, Ediţia 7, Vol.9519, p. 0. ISBN 978-162841642-8. ISSN 0277786X. DOI: https://doi.org/10.1117/12.2178525
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Proceedings of SPIE - The International Society for Optical Engineering
Ediţia 7, Vol.9519, 2015
Conferința "Nanotechnology"
7, Barcelona, Spania, 4-6 mai 2015

Fabrication of photonic crystal circuits based on GaN ultrathin membranes by maskless lithography

DOI:https://doi.org/10.1117/12.2178525

Pag. 0-0

Volciuc Olesea1, Braniste Tudor2, Sergentu Vladimir3, Ursachi Veaceslav2, Tiginyanu Ion2, Gutowski Jurgen1
 
1 University of Bremen,
2 National Center for Materials Study and Testing, Technical University of Moldova,
3 Institute of Applied Physics, Academy of Sciences of Moldova
 
 
Disponibil în IBN: 19 mai 2023


Rezumat

We report on maskless fabrication of photonic crystal (PhC) circuits based on ultrathin (d ∼ 15 nm) nanoperforated GaN membranes exhibiting a triangular lattice arrangement of holes with diameters of 150 nm. In recent years, we have proposed and developed a cost-effective technology for GaN micro- and nanostructuring, the so-called surface charge lithography (SCL), which opened wide possibilities for a controlled fabrication of GaN ultrathin membranes. SCL is a maskless approach based on direct writing of negative charges on the surface of a semiconductor by a focused ion beam (FIB). These charges shield the material against photo-electrochemical (PEC) etching. Ultrathin GaN membranes suspended on specially designed GaN microstructures have been fabricated using a technological route based on SCL with two selected doses of ion beam treatment. Calculation of the dispersion law in nanoperforated membranes in the approximation of scalar waves is indicative of the occurrence of surface and bulk modes, and there is a range of frequencies where only surface modes can exist. Advantages of the occurrence of two types of modes in ultrathin nanoperforated GaN membranes from the point of view of their incorporation in photonic and optoelectronic integrated circuits are discussed. Along with this, we present the results of a comparative analysis of persistent photoconductivity (PPC) and optical quenching (OQ) effects occurring in continuous and nanoperforated ultrathin GaN suspended membranes, and assess the mechanisms behind these phenomena.

Cuvinte-cheie
GaN Ultrathin Membranes, Nanostructure Fabrication, Photonic Crystals, Theory and Design