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| Ultima descărcare din IBN: 2023-09-13 16:33 |
 SM ISO690:2012SERGEEV, Sergei, YOVU, M., IASENIUC, Oxana. Electron-beam recording of patterns in chalcogenide films. In: Proceedings of SPIE - The International Society for Optical Engineering, Ed. 7, 21-24 august 2014, Constanța. Bellingham, Washington: SPIE, 2015, Ediţia 7, Vol.9258, pp. 1-7. ISBN 978-162841325-0. ISSN 0277786X. DOI: https://doi.org/10.1117/12.2069974 |
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 Proceedings of SPIE - The International Society for Optical Engineering Ediţia 7, Vol.9258, 2015 |
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Conferința "Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies" 7, Constanța, Romania, 21-24 august 2014 | ||||||
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| DOI:https://doi.org/10.1117/12.2069974 | ||||||
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Thin films of chalcogenide glasses (ChG) of different composition have been used for e-beam recording of diffraction grating structures. The dependencies of diffraction efficiency of gratings on radiation dose were studied. The influence of ChG film composition on diffraction properties of gratings was shown. It was established that the refractive index gratings formed in As2S3 films exhibit high stability during their dark storage. The diffraction efficiency enhancement caused by uniform light irradiation was observed for gratings recorded in As4S3Se3thin films, doped with Sn. With use of computer-controlled positioning of electron beam both the raster scan and vector patterns were recorded in As2S3 films. In the former case the images from BMP-files were patterned. In the latter case the mosaic of diffraction gratings, producing the multi-beam light diffraction was recorded. |
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| Cuvinte-cheie Chalcogenide films, Diffraction gratings, e-beam recording, mosaic of gratings, raster scan patterns |
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