| Conţinutul numărului revistei |
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 SM ISO690:2012САФАРОВ, А., ШУКУРОВА, Д., ИКРAМОВ, А., АРСЛАНОВА, Т.. Проблемы получения оксида на кремнии. In: Электронная обработка материалов, 2003, nr. 4(39), pp. 84-86. ISSN 0013-5739. |
| EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
 Электронная обработка материалов |
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| Numărul 4(39) / 2003 / ISSN 0013-5739 /ISSNe 2345-1718 | ||||||
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| Pag. 84-86 | ||||||
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In this work mentioned about the properties of the overthin layer of the SiO2. Showed that the chargeable condition at the boundary between Si and SiO2 depends on conditions of the oxidation. |
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