Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

Harea Evghenii; Aifantis Katerina E.; Pyrtsac Constantin; Ghimpu Lidia

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HAREA, Evghenii, AIFANTIS, Katerina E., PYRTSAC, Constantin, GHIMPU, Lidia. Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films. In: NATO Science for Peace and Security Series A: Chemistry and Biology, 2015, vol. 39, pp. 53-59. ISSN 1874-6489. DOI: https://doi.org/10.1007/978-94-017-9697-2_5

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NATO Science for Peace and Security Series A: Chemistry and Biology

Volumul 39 / 2015 / ISSN 1874-6489 /ISSNe 1874-6527

Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

DOI:https://doi.org/10.1007/978-94-017-9697-2_5

Pag. 53-59

Harea Evghenii¹, Aifantis Katerina E.², Pyrtsac Constantin¹, Ghimpu Lidia³

¹ Institute of Applied Physics, Academy of Sciences of Moldova,
² Aristotle University of Thessaloniki,
³ Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu" of the Academy of Sciences of Moldova

Disponibil în IBN: 10 mai 2023

Rezumat

The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.

Cuvinte-cheie
Cyclic nanoindentation, strain sensor, thin films