Multilayer porous structures on GaN for the fabrication of Bragg reflectors
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BRANISTE, Tudor, MONAICO, Eduard, MARTÍN, Denis, CARLIN, Jean Franc, POPA, Veaceslav, URSACHI, Veaceslav, GRANDJEAN, Nicolas, TIGINYANU, Ion. Multilayer porous structures on GaN for the fabrication of Bragg reflectors. In: Proceedings of SPIE - The International Society for Optical Engineering, Ed. 8, 8-9 mai 2017, Barselona. Bellingham, Washington USA: SPIE, 2017, Ediția 8, Vol.10248, p. 1. ISBN 978-151060997-6. ISSN 0277786X. DOI: https://doi.org/10.1117/12.2266280
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Proceedings of SPIE - The International Society for Optical Engineering
Ediția 8, Vol.10248, 2017
Conferința "Nanotechnology"
8, Barselona, Spania, 8-9 mai 2017

Multilayer porous structures on GaN for the fabrication of Bragg reflectors

DOI:https://doi.org/10.1117/12.2266280

Pag. 1-1

Braniste Tudor1, Monaico Eduard1, Martín Denis2, Carlin Jean Franc2, Popa Veaceslav3, Ursachi Veaceslav2, Grandjean Nicolas2, Tiginyanu Ion13
 
1 Technical University of Moldova,
2 Swiss Federal Institute of Technology Lausanne,
3 Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu" of the Academy of Sciences of Moldova
 
 
Disponibil în IBN: 28 februarie 2022


Rezumat

We report on the development of electrochemical etching technology for the production of multilayer porous structures (MPS) allowing one to fabricate Bragg reflectors on the basis of GaN bulk substrates grown by Hydride Vapor Phase Epitaxy (HVPE). The formation of MPS during anodization is caused by the spatial modulation of the electrical conductivity throughout the surface and the volume of the HVPE-grown GaN substrate, which occurs according to a previously proposed model involving generation of pits and their overgrowth. We found that the topology of the porous sheets constituting the MPS is different in the vicinity of N-face and Ga-face of the bulk wafer, it being of conical shape near the N-face and of hemispherical shape near the Ga-face. The composition of electrolytes, their concentration as well as the anodization potential applied during electrochemical etching are among technological parameters optimized for designing MPS suitable for Bragg reflector applications. It is shown also that regions with various porosities can be produced in depth of the sample by changing the anodization potential during the electrochemical etching.

Cuvinte-cheie
Bragg reflectors, Electrochemical etching, GaN, Hydride Vapor Phase Epitaxy, Multilayer Porous Structure