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SM ISO690:2012 MORARI, Vadim, PYRTSAC, Constantin, CURMEI, Nicolai, GRABCO, Daria, RUSU, Emil, URSACHI, Veaceslav, TIGINYANU, Ion. Nanoindentation of ZnSnO/Si thin films prepared by aerosol spray pyrolysis. In: Romanian Journal of Physics, 2021, vol. 66, pp. 1-18. ISSN 1221-146X. |
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Romanian Journal of Physics | ||||||
Volumul 66 / 2021 / ISSN 1221-146X | ||||||
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Pag. 1-18 | ||||||
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Thin ZnSnO films with different thickness deposited on Si substrates by aerosol spray pyrolysis were investigated by scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX), X-ray diffraction (XRD), atomic force microscopy (AFM) and light microscopy (LM) using depth-sensitive nanoindentation with Berkovich indenter. The values of the Young modulus (E), nanohardness (H), and plasticity index (H/E) of the prepared films were determined according to the Oliver-Pharr method in the diapason of the applied loads of 30–300 mN. The main factors contributing to the nanomechanical properties of film-substrate structures were identified, and the deformation mechanisms of the ZnSnO/Si coated system (CS) under nanoindentation have been revealed. |
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Cuvinte-cheie aerosol spray pyrolysis, Deformation mechanisms, nanoindentation, Thin metal oxide semiconductor films |
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