Photosensivity of heterostructures produced by aerosol deposition of ZnMgO thin films on Si substrates
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MORARI, Vadim; MONAICO, Eduard; RUSU, Emil; LEISTNER, Karin; NIELSCH, Kornelius; URSAKI, Veacheslav; TIGINYANU, Ion. Photosensivity of heterostructures produced by aerosol deposition of ZnMgO thin films on Si substrates. In: Proceedings of SPIE - The International Society for Optical Engineering. Volume 11718, 20-23 august 2020, Constanta. Bellingham, USA: SPIE, 2020, p. 0.
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Proceedings of SPIE - The International Society for Optical Engineering
Volume 11718, 2020
Conferința "Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies X 2020"
Constanta, Romania, 20-23 august 2020

Photosensivity of heterostructures produced by aerosol deposition of ZnMgO thin films on Si substrates

DOI: https://doi.org/10.1117/12.2571189

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Morari Vadim1, Monaico Eduard2, Rusu Emil1, Leistner Karin3, Nielsch Kornelius3, Ursaki Veacheslav2, Tiginyanu Ion2
 
1 Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu",
2 Technical University of Moldova,
3 Leibniz Institute for Solid State and Materials Reseach, Dresden
 
Disponibil în IBN: 26 martie 2021


Rezumat

ZnMgO thin films were prepared on Si substrates by aerosol deposition method using zinc acetate and magnesium acetate as precursors. The obtained films were investigated by scanning electron microscopy (SEM), energy dispersive xray (EDX) and X-Ray Diffraction (XRD) analysis. SEM and EDX investigations showed that the produced thin films are homogeneous from the point of view of morphology and composition. The investigation of photosensitivity demonstrated that the heterostructures of ZnMgO thin films deposited on Si substrates are sensitive in a wide spectral range from ultraviolet (UV) to infrared (IR) radiation, with a highest sensitivity in the UV region.

Cuvinte-cheie
Photocurrent, photosensitivity, UV irradiation, ZnMgO, ZnO