Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers
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POPA, Valeriu. Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers. In: Moldavian Journal of the Physical Sciences, 2005, nr. 1(4), pp. 125-129. ISSN 1810-648X.
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Moldavian Journal of the Physical Sciences
Numărul 1(4) / 2005 / ISSN 1810-648X /ISSNe 2537-6365

Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers


Pag. 125-129

Popa Valeriu
 
Technical University of Moldova
 
 
Disponibil în IBN: 16 decembrie 2013


Rezumat

Photoelectrochemical etching of GaN in different solutions such as KOH, HF/H2O2/C2H5OH and oxalic acid was performed. The results of scanning electron microscopy cathodoluminescence analysis of the etched samples are presented.