SnO2 thin film parameter influence on gas sensitive characteristics
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DMITRIEV, Serghei, BRYNZARI, Vladimir, KOROTCHENKOV, Ghenadii. SnO2 thin film parameter influence on gas sensitive characteristics. In: Moldavian Journal of the Physical Sciences, 2005, nr. 1(4), pp. 102-105. ISSN 1810-648X.
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Moldavian Journal of the Physical Sciences
Numărul 1(4) / 2005 / ISSN 1810-648X /ISSNe 2537-6365

SnO2 thin film parameter influence on gas sensitive characteristics


Pag. 102-105

Dmitriev Serghei1, Brynzari Vladimir2, Korotchenkov Ghenadii2
 
1 Moldova State University,
2 Technical University of Moldova
 
 
Disponibil în IBN: 16 decembrie 2013


Rezumat

In this report we present results of investigation of influence of the parameters of SnO2 thin film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method. The influence of technologic parameters on concentration of free electrons n, stoichiometry, thickness d and gas sensitivity S=Rgas/Rair was investigated by means of electrophysical, IR-spectroscopy and SIMS measurements. It was established that optimal spray solution s composition is 0.2M, which allows depositing of SnO2 films with required parameters: n-1018 -1019 cm-3, R=105 -106 and S>10 correspondently. Obtained results on gas sensitivity are compared with results of theoretical considerations.

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film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method.  
The  influence  of  technologic  parameters  on  concentration  of  free  electrons  n, 
stoichiometry,  thickness  d  and  gas  sensitivity  S=Rgas/Rair  was  investigated  by  means  of 
electrophysical, IR-spectroscopy and SIMS measurements. It was established  that optimal spray 
solution s composition is 0.2M, which allows depositing of SnO2  films with required parameters: 
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