Observation of crossing pores in anodically etched n-gaas
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LANGA, Sergiu, CARSTENSEN, Juergen, CHRISTOPHERSEN, Marc, FOLL, Helmut, TIGINYANU, Ion. Observation of crossing pores in anodically etched n-gaas. In: Applied Physics Letters, 2001, vol. 78, pp. 1074-1076. ISSN 0003-6951. DOI: https://doi.org/10.1063/1.1350433
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Applied Physics Letters
Volumul 78 / 2001 / ISSN 0003-6951 /ISSNe 1077-3118

Observation of crossing pores in anodically etched n-gaas

DOI:https://doi.org/10.1063/1.1350433

Pag. 1074-1076

Langa Sergiu12, Carstensen Juergen1, Christophersen Marc1, Foll Helmut1, Tiginyanu Ion2
 
1 Christian-Albrechts University of Kiel,
2 Technical University of Moldova
 
 
Disponibil în IBN: 15 iunie 2023


Rezumat

Pores in GaAs in the micrometer range and oriented in 〈111〉 directions have been observed during the anodization of GaAs in aqueous HCl electrolytes. A direct evidence of pores intersection is presented which is a very promising feature for three-dimensional micro-and nanostructuring of III-V compounds for the production of photonic materials. 

Cuvinte-cheie
Electrochemical etching, III-V semiconductors, Indium Phosphides