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 SM ISO690:2012POSTICA, Vasile, REIMER, Tim, LAZARI, Eugeniu, ABABII, Nicolai, SHISHIYANU, Sergiu, RAILEAN, Sergey, KAIDAS, Victor, KAPS, Soren, LUPAN, Oleg, BENECKE, Wolfgang, ADELUNG, Rainer. Sensing properties of ultra-thin TiO2 nanostructured films based sensors. In: IFMBE Proceedings: 3rd International Conference on Nanotechnologies and Biomedical Engineering, ICNBME 2015, Ed. 3, 23-26 septembrie 2015, Chişinău. Springer, 2016, Editia 3, Vol.55, pp. 149-152. ISBN 978-981287735-2. ISSN 16800737. DOI: https://doi.org/10.1007/978-981-287-736-9_36 |
| EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
 IFMBE Proceedings Editia 3, Vol.55, 2016 |
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Conferința "International Conference on Nanotechnologies and Biomedical Engineering" 3, Chişinău, Moldova, 23-26 septembrie 2015 | ||||||
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| DOI:https://doi.org/10.1007/978-981-287-736-9_36 | ||||||
| Pag. 149-152 | ||||||
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In this work, ultra-thin TiO2 nanostructured films, synthesized by atomic layer deposition method (ALD), were integrated in sensor structures. The effect of post-growth annealing and thickness of TiO2 samples on UV and hydrogen gas sensing properties is investigated. An increase in current value of more than one order of magnitude (IUVON/IUVOFF~38) has been detected under exposure to UV light (365 nm) of sample with 45 nm thickness and annealed in furnace at 650 °C for 2 hours. Samples with 15 nm thickness and rapid thermal annealed at 450 °C for 3 min, have shown hydrogen gas response (~3.75). |
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| Cuvinte-cheie ALD, gas sensor, Photodetector, TiO2, Ultra-thin films |
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Dublin Core Export
<?xml version='1.0' encoding='utf-8'?> <oai_dc:dc xmlns:dc='http://purl.org/dc/elements/1.1/' xmlns:oai_dc='http://www.openarchives.org/OAI/2.0/oai_dc/' xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xsi:schemaLocation='http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd'> <dc:creator>Postica, V.</dc:creator> <dc:creator>Reimer, T.</dc:creator> <dc:creator>Lazari, E.</dc:creator> <dc:creator>Ababii, N.</dc:creator> <dc:creator>Şişianu, S.T.</dc:creator> <dc:creator>Railean, S.C.</dc:creator> <dc:creator>Kaidas, V.</dc:creator> <dc:creator>Kaps, S.</dc:creator> <dc:creator>Lupan, O.I.</dc:creator> <dc:creator>Benecke, W.</dc:creator> <dc:creator>Adelung, R.</dc:creator> <dc:date>2016</dc:date> <dc:description xml:lang='en'><p>In this work, ultra-thin TiO<sub>2</sub> nanostructured films, synthesized by atomic layer deposition method (ALD), were integrated in sensor structures. The effect of post-growth annealing and thickness of TiO<sub>2</sub> samples on UV and hydrogen gas sensing properties is investigated. An increase in current value of more than one order of magnitude (I<sub>UVON</sub>/I<sub>UVOFF</sub>~38) has been detected under exposure to UV light (365 nm) of sample with 45 nm thickness and annealed in furnace at 650 °C for 2 hours. Samples with 15 nm thickness and rapid thermal annealed at 450 °C for 3 min, have shown hydrogen gas response (~3.75). </p></dc:description> <dc:source>IFMBE Proceedings (Editia 3, Vol.55) 149-152</dc:source> <dc:subject>ALD</dc:subject> <dc:subject>gas sensor</dc:subject> <dc:subject>Photodetector</dc:subject> <dc:subject>TiO2</dc:subject> <dc:subject>Ultra-thin films</dc:subject> <dc:title>Sensing properties of ultra-thin TiO2 nanostructured films based sensors</dc:title> <dc:type>info:eu-repo/semantics/article</dc:type> </oai_dc:dc>
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