Sensing properties of ultra-thin TiO2 nanostructured films based sensors
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POSTICA, Vasile, REIMER, Tim, LAZARI, Eugeniu, ABABII, Nicolai, SHISHIYANU, Sergiu, RAILEAN, Sergey, KAIDAS, Victor, KAPS, Soren, LUPAN, Oleg, BENECKE, Wolfgang, ADELUNG, Rainer. Sensing properties of ultra-thin TiO2 nanostructured films based sensors. In: IFMBE Proceedings: 3rd International Conference on Nanotechnologies and Biomedical Engineering, ICNBME 2015, Ed. 3, 23-26 septembrie 2015, Chişinău. Springer, 2016, Editia 3, Vol.55, pp. 149-152. ISBN 978-981287735-2. ISSN 16800737. DOI: https://doi.org/10.1007/978-981-287-736-9_36
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IFMBE Proceedings
Editia 3, Vol.55, 2016
Conferința "International Conference on Nanotechnologies and Biomedical Engineering"
3, Chişinău, Moldova, 23-26 septembrie 2015

Sensing properties of ultra-thin TiO2 nanostructured films based sensors
DOI:https://doi.org/10.1007/978-981-287-736-9_36

Pag. 149-152

Postica Vasile1, Reimer Tim23, Lazari Eugeniu1, Ababii Nicolai1, Shishiyanu Sergiu1, Railean Sergey1, Kaidas Victor2, Kaps Soren2, Lupan Oleg12, Benecke Wolfgang3, Adelung Rainer2
 
1 Technical University of Moldova,
2 Institute for Material Science, Christian-Albrechts-University of Kiel,
3 Fraunhofer Institute for Silicon Technologies (ISIT)
 
 
Disponibil în IBN: 8 ianuarie 2023
Rezumat

In this work, ultra-thin TiO2 nanostructured films, synthesized by atomic layer deposition method (ALD), were integrated in sensor structures. The effect of post-growth annealing and thickness of TiO2 samples on UV and hydrogen gas sensing properties is investigated. An increase in current value of more than one order of magnitude (IUVON/IUVOFF~38) has been detected under exposure to UV light (365 nm) of sample with 45 nm thickness and annealed in furnace at 650 °C for 2 hours. Samples with 15 nm thickness and rapid thermal annealed at 450 °C for 3 min, have shown hydrogen gas response (~3.75). 
Cuvinte-cheie
ALD, gas sensor, Photodetector, TiO2, Ultra-thin films

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