The photoelectrochemical etching as a tool for GaN gas sensor fabrication
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POPA, Veaceslav. The photoelectrochemical etching as a tool for GaN gas sensor fabrication. In: Электронная обработка материалов, 2005, nr. 4(41), pp. 7-10. ISSN 0013-5739.
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Электронная обработка материалов
Numărul 4(41) / 2005 / ISSN 0013-5739 /ISSNe 2345-1718

The photoelectrochemical etching as a tool for GaN gas sensor fabrication


Pag. 7-10

Popa Veaceslav
 
Technical University of Moldova
 
 
Disponibil în IBN: 29 martie 2023


Rezumat

Whisker and columnar structures of GaN were fabricated using photoelectrochemical etching in KOH solution. The conductivity changes of the obtained structures to ethylic alcohol and hydrogen were studied. Optimized design for sensor fabrication is proposed.