| Articolul precedent |
| Articolul urmator |
 662 0 |
 SM ISO690:2012POSTICA, Vasile, REIMER, Tim, LAZARI, Eugeniu, ABABII, Nicolai, SHISHIYANU, Sergiu, RAILEAN, Sergey, KAIDAS, Victor, KAPS, Soren, LUPAN, Oleg, BENECKE, Wolfgang, ADELUNG, Rainer. Sensing properties of ultra-thin TiO2 nanostructured films based sensors. In: Nanotechnologies and Biomedical Engineering, Ed. 3, 23-26 septembrie 2015, Chișinău. Springer, 2015, Editia 3, p. 51. |
| EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
| Nanotechnologies and Biomedical Engineering Editia 3, 2015 |
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Conferința "International Conference on Nanotechnologies and Biomedical Engineering" 3, Chișinău, Moldova, 23-26 septembrie 2015 | ||||||
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| Pag. 51-51 | ||||||
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In this work, ultra-thin TiO2 nanostructured films, synthesized by atomic layer deposition method (ALD), were integrated in sensor structures. The effect of post-growth annealing and thickness of TiO2 samples on UV and hydrogen gas sensing properties is investigated. An increase in current value of more than one order of magnitude (IUVON/IUVOFF~38) has been detected under exposure to UV light (365 nm) of sample with 45 nm thickness and annealed in furnace at 650 ˚C for 2 hours. Samples with 15 nm thickness and rapid thermal annealed at 450 ˚C for 3 min, have shown hydrogen gas response (~3.75). |
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