Conţinutul numărului revistei |
Articolul precedent |
Articolul urmator |
752 6 |
Ultima descărcare din IBN: 2023-10-11 10:47 |
Căutarea după subiecte similare conform CZU |
621.9.048.4 (36) |
Working or machining with chip formation. Abrasive working. Hammers and presses (129) |
SM ISO690:2012 TOPALĂ, Pavel, MELNIC, Vasile, GUZGAN, Dorin. Micro-oxidation of silicon surfaces by means of electrical discharges in impulse. In: Fizică şi tehnică: procese, modele, experimente, 2013, nr. 2, pp. 32-36. ISSN 1857-0437. |
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Fizică şi tehnică: procese, modele, experimente | ||||||
Numărul 2 / 2013 / ISSN 1857-0437 | ||||||
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CZU: 621.9.048.4 | ||||||
Pag. 32-36 | ||||||
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The paper presents the results of the theoretical and experimental study of the formation of oxide films on silicon surfaces by means of rapid thermal oxidation in plasma caused by electrical discharges in impulse. The oxidation process has been carried out under normal atmospheric conditions. It has been shown that the properties of the oxide films depend on the processing power as well as the electrode base materials. |
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Cuvinte-cheie discharge, oxidationof silicon surface, oxide films, descărcare, oxidarea suprafeţelor din siliciu, pelicule de oxizi |
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Crossref XML Export
<?xml version='1.0' encoding='utf-8'?> <doi_batch version='4.3.7' xmlns='http://www.crossref.org/schema/4.3.7' xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xsi:schemaLocation='http://www.crossref.org/schema/4.3.7 http://www.crossref.org/schema/deposit/crossref4.3.7.xsd'> <head> <doi_batch_id>ibn-39317</doi_batch_id> <timestamp>1714546155</timestamp> <depositor> <depositor_name>Information Society Development Instiute, Republic of Moldova</depositor_name> <email_address>idsi@asm.md</email_address> </depositor> <registrant>Universitatea de Stat „Alecu Russo” din Bălţi</registrant> </head> <body> <journal> <journal_metadata> <full_title>Fizică şi tehnică: procese, modele, experimente</full_title> <issn media_type='print'>18570437</issn> </journal_metadata> <journal_issue> <publication_date media_type='print'> <year>2013</year> </publication_date> <issue>2</issue> </journal_issue> <journal_article publication_type='full_text'><titles> <title>Micro-oxidation of silicon surfaces by means of electrical discharges in impulse</title> </titles> <contributors> <person_name sequence='first' contributor_role='author'> <given_name>Pavel</given_name> <surname>Topală</surname> </person_name> <person_name sequence='additional' contributor_role='author'> <given_name>Vasile</given_name> <surname>Melnic</surname> </person_name> <person_name sequence='additional' contributor_role='author'> <given_name>Dorin</given_name> <surname>Guzgan</surname> </person_name> </contributors> <publication_date media_type='print'> <year>2013</year> </publication_date> <pages> <first_page>32</first_page> <last_page>36</last_page> </pages> </journal_article> </journal> </body> </doi_batch>