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![]() LUPAN, Oleg, CHOW, Lee, SHISHIYANU, Sergiu, MONAICO, Eduard, SHISHIYANU, Teodor, SHONTYA, Viktor, ROLDAN CUENYA, Beatriz, NAITABDI, Ahmed, PARK, Sang Hoon, SCHULTE, Alfons. Nanostructured zinc oxide films synthesized by successive chemical solution deposition for gas sensor applications. In: Materials Research Bulletin, 2009, vol. 44, pp. 63-69. ISSN 0025-5408. DOI: https://doi.org/10.1016/j.materresbull.2008.04.006 |
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Materials Research Bulletin | |||||||
Volumul 44 / 2009 / ISSN 0025-5408 | |||||||
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DOI:https://doi.org/10.1016/j.materresbull.2008.04.006 | |||||||
Pag. 63-69 | |||||||
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Nanostructured ZnO thin films have been deposited using a successive chemical solution deposition method. The structural, morphological, electrical and sensing properties of the films were studied for different concentrations of Al-dopant and were analyzed as a function of rapid photothermal processing temperatures. The films were investigated by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray photoelectron and micro-Raman spectroscopy. Electrical and gas sensitivity measurements were conducted as well. The average grain size is 240 and 224 Å for undoped ZnO and Al-doped ZnO films, respectively. We demonstrate that rapid photothermal processing is an efficient method for improving the quality of nanostructured ZnO films. Nanostructured ZnO films doped with Al showed a higher sensitivity to carbon dioxide than undoped ZnO films. The correlations between material compositions, microstructures of the films and the properties of the gas sensors are discussed. |
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Cuvinte-cheie A. Nanostructures, A. Oxides, B. Chemical synthesis, D. Electrical properties |
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