Particularități structurale ale filmelor ZnSnN2
Close
Articolul precedent
Articolul urmator
98 0
SM ISO690:2012
GHILEȚCHII, Gheorghe, NAROLSCHI, Igor, ROTARU, Corneliu, RUSU, Marin, VATAVU, Sergiu. Particularități structurale ale filmelor ZnSnN2. In: Integrare prin cercetare și inovare.: Ştiinţe ale naturii și exacte, 9-10 noiembrie 2023, Chișinău. Chisinau, Republica Moldova: Centrul Editorial-Poligrafic al USM, 2023, SNE, pp. 728-732. ISBN 978-9975-62-690-3.
EXPORT metadate:
Google Scholar
Crossref
CERIF

DataCite
Dublin Core
Integrare prin cercetare și inovare.
SNE, 2023
Conferința "Integrare prin cercetare și inovare."
Chișinău, Moldova, 9-10 noiembrie 2023

Particularități structurale ale filmelor ZnSnN2

Structural peculiarities of ZnSnN2 thin films


Pag. 728-732

Ghilețchii Gheorghe, Narolschi Igor, Rotaru Corneliu, Rusu Marin, Vatavu Sergiu
 
Universitatea de Stat din Moldova
 
Proiecte:
 
Disponibil în IBN: 3 aprilie 2024


Rezumat

ZnSnN2 is composed of common non-toxic elements. It exhibits promising optoelectronic properties for application in photoelectric conversion and electromagnetic radiation detection devices. However, the available data on its physical properties are incomplete or contradictory. In this work, we prepare ZnSnN2 thin films and study in detail their structural properties as function of deposition conditions. DC magnetron sputtering was used because it allows the preparation of thin polycrystalline ZnSnN2 films on large areas and it can be easily upscaled. The films were prepared using targets of various atomic [Zn]/[Sn] ratios in nitrogen atmosphere at temperatures ranging from 30 to 300°C. Structural analysis, using Grazing Incidence X-ray Diffraction (GIXRD) and X-ray Reflectivity (XRR), revealed the formation of polycrystalline ZnSnN2 films with a wurtzite crystal structure. The obtained structural parameters were found to be influenced by the substrate temperature and elemental concentration in the target. These findings will be used for optimization of the manufacturing process for desired film characteristics.

Cuvinte-cheie
ZnSnN2, strat subțire, GI-XRD, XRR