Processes controlling the rate of in2O3 thin film gas sensor's response
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KOROTCHENKOV, Ghenadii, BRYNZARI, Vladimir, IVANOV, Michail, BLINOV, Iurii, STETTER, Joseph R.. Processes controlling the rate of in2O3 thin film gas sensor's response. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 36, 3-5 octombrie 2005, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2005, Vol. 1, Ediția 28, pp. 209-212. ISBN 0780392140, 978-078039214-4. DOI: https://doi.org/10.1109/SMICND.2005.1558749
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Proceedings of the International Semiconductor Conference
Vol. 1, Ediția 28, 2005
Conferința "28th International Semiconductor Conference"
36, Sinaia, Romania, 3-5 octombrie 2005

Processes controlling the rate of in2O3 thin film gas sensor's response

DOI:https://doi.org/10.1109/SMICND.2005.1558749

Pag. 209-212

Korotchenkov Ghenadii1, Brynzari Vladimir1, Ivanov Michail1, Blinov Iurii1, Stetter Joseph R.2
 
1 Technical University of Moldova,
2 Illinois Institute of Technology
 
 
Disponibil în IBN: 22 noiembrie 2023


Rezumat

The kinetics of gas response to reducing and oxidizing gases of In 2O3-based thin film gas sensors is analyzed in this report. The influence of operating temperature, air humidity and film thickness (d from 20 to 400 nm) on both the Eact and time constants of gas response is reviewed. Model conceptions allowing to explain specific character of In2O3 interaction with reducing and oxidizing gases are proposed.

Cuvinte-cheie
gas response, In2O3, kinetics, thin films

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<dc:creator>Korotcenkov, G.S.</dc:creator>
<dc:creator>Brînzari, V.I.</dc:creator>
<dc:creator>Ivanov, M.</dc:creator>
<dc:creator>Blinov, I.</dc:creator>
<dc:creator>Stetter, J.</dc:creator>
<dc:date>2005</dc:date>
<dc:description xml:lang='en'><p>The kinetics of gas response to reducing and oxidizing gases of In&nbsp;<sub>2</sub>O<sub>3</sub>-based thin film gas sensors is analyzed in this report. The influence of operating temperature, air humidity and film thickness (d from 20 to 400 nm) on both the E<sub>act</sub>&nbsp;and time constants of gas response is reviewed. Model conceptions allowing to explain specific character of In<sub>2</sub>O<sub>3</sub>&nbsp;interaction with reducing and oxidizing gases are proposed.</p></dc:description>
<dc:source>Proceedings of the International Semiconductor Conference (Vol. 1, Ediția 28) 209-212</dc:source>
<dc:subject>gas response</dc:subject>
<dc:subject>In2O3</dc:subject>
<dc:subject>kinetics</dc:subject>
<dc:subject>thin films</dc:subject>
<dc:title>Processes controlling the rate of in2O3 thin film gas sensor&#39;s response</dc:title>
<dc:type>info:eu-repo/semantics/article</dc:type>
</oai_dc:dc>