SnO2 films for thin film gas sensor design
Close
Conţinutul numărului revistei
Articolul precedent
Articolul urmator
129 0
SM ISO690:2012
KOROTCHENKOV, Ghenadii, BRYNZARI, Vladimir, DMITRIEV, Serghei. SnO2 films for thin film gas sensor design. In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1999, vol. 63, pp. 195-204. ISSN 0921-5107. DOI: https://doi.org/10.1016/S0921-5107(99)00136-1
EXPORT metadate:
Google Scholar
Crossref
CERIF

DataCite
Dublin Core
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Volumul 63 / 1999 / ISSN 0921-5107

SnO2 films for thin film gas sensor design

DOI:https://doi.org/10.1016/S0921-5107(99)00136-1

Pag. 195-204

Korotchenkov Ghenadii, Brynzari Vladimir, Dmitriev Serghei
 
Technical University of Moldova
 
 
Disponibil în IBN: 20 iunie 2023


Rezumat

In this report we present the results of the study of the influence of the parameters of SnO2 thin films on their basic gas sensitive characteristics such as kinetics and absolute gas sensitivity. We have particularly investigated the influence of the film thickness, structure, concentration of charge carriers, and presence of uncontrolled impurities in the SnO2 films, which were deposited by spray pyrolysis method. Based on experimental results, the important parameters such as deposition conditions, film thickness and metal-type doping level leading to best exploitation parameters of thin film gas sensors could be optimized.

Cuvinte-cheie
Gas sensitivity, parameters, selection, SnO2, spray pyrolysis, thin films