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 SM ISO690:2012BARANOV, Simion, FIODOROV, Ion, COJUHARI, Irina, GLINCA, Maxim. Analysis of the Control Action of the epitaxial layers growing in the automatic system with PID controller. In: Sielmen: Proceedings of the 11th international conference on electromechanical and power systems, Ed. 11, 11-13 octombrie 2017, Iași. New Jersey, SUA: Institute of Electrical and Electronics Engineers Inc., 2017, Ediția 11, pp. 36-41. ISBN 978-153861846-2. DOI: https://doi.org/10.1109/SIELMEN.2017.8123288 |
| EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
 Sielmen Ediția 11, 2017 |
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Conferința "Sielmen" 11, Iași, Romania, 11-13 octombrie 2017 | ||||||
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| DOI:https://doi.org/10.1109/SIELMEN.2017.8123288 | ||||||
| Pag. 36-41 | ||||||
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It is reported an investigation of control action (CA) of the energy source in the automatic control system of thermal process’ parameters in the technology of the epitaxial growing of the compound layers A3B5 by the reaction transport method in the quasi-rapidity conditions. These conditions superpose more rigid requirements of dynamic error over the minimum value of static error in the modern technological equipment. In the conditions of the optimal rapidity it is studied the quality of the control action, which is formed in the control device according to the control algorithm of the object, in the given case, it is investigated - the thermal object, and its correlation with the quality of the energy source of the system. |
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| Cuvinte-cheie A3B5 compounds, automatic control system, Control action, Hydride Vapor Phase Epitaxy |
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