Afiliat la National Research Nuclear University MEPhI, Moscow
Fabrication MEMS platform for sensors applications by laser micro engraving |
Ivanova Anastasia , Oblov Konstntin , Soloviev Sergey , Samotaev Nikolay , Gurkovskiy B. , Mironov V. |
Nanotechnologies and Biomedical Engineering |
Editia 3. 2015. . Springer. 94-94. |
Disponibil online 13 April, 2019 |
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