Scopus Author ID
Publicaţii peste hotare - 1.
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Publicaţii peste hotare - 1.
Shape evolution during through-mask electrochemical micromachining at low and high aspect ratio ![]() ![]() |
Dikusar Aleksandr , Keloglu O. , Yushchenko Serghei |
Academy of Sciences of Moldova |
Proceedings of the International Semiconductor Conference CAS |
Vol. 2. 1998. New Jersey. DOI 10.1109/SMICND.1998.732248. |
Disponibil online 1 December, 2023. Descarcări-0. Vizualizări-112 |