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SM ISO690:2012 HOLODCOV, Igor. Energy Distribution of Ions in Near-Cathode Regions of Glow Discharge in an Argon–Oxygen Mixture. In: Surface Engineering and Applied Electrochemistry, 2009, nr. 5(45), pp. 353-354. ISSN 1068-3755. |
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Surface Engineering and Applied Electrochemistry | ||||||
Numărul 5(45) / 2009 / ISSN 1068-3755 /ISSNe 1934-8002 | ||||||
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Pag. 353-354 | ||||||
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—Investigation results are presented for the ion energy distribution in the cathode region of direct current discharges in argon–oxygen mixtures containing 0–100% argon at different plasma parameters (a pressure of 1.0–3.0 Pa and a discharge current of 0.0–30.0 mA). It has been shown that an argon percentage of more than 20% results in the Ar2 ion formation and shifting the distribution maximum to higher energies. |
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