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 SM ISO690:2012KOROTCHENKOV, Ghenadii, TOLSTOY, Valeri, BRYNZARI, Vladimir. Morphological engineering of SnO 2 and In 2O 3 films deposited by spray pyrolysis. In: Bulletin of Materials Science, 2019, nr. 5(42), p. 0. ISSN 0250-4707. DOI: https://doi.org/10.1007/s12034-019-1910-5 |
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 Bulletin of Materials Science |
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| Numărul 5(42) / 2019 / ISSN 0250-4707 | ||||||
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| DOI:https://doi.org/10.1007/s12034-019-1910-5 | ||||||
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This article demonstrates the possibility of controlling the morphology of deposited metal oxide films by the preliminary formation of the seed-layers of the appropriate oxide on the substrate surface using a simple and cheap method such as successive ionic layer deposition. The study focuses on SnO 2 and In 2O 3 due to their importance in the field of various chemical microsensors. Graphical abstract: [Figure not available: see fulltext.]. |
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| Cuvinte-cheie deposition, metal oxides, morphology control, seed-layer, spray pyrolysis, successive ionic layer deposition |
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