CdS is a material whose physical properties with optoelectronic applications are influenced by the preparation technology, especially the type of substrate and its temperatures. CdS thin films were deposited by the CSS method on TCO (AZO, SnO2)/Glass substrates, varying the substrate temperature between 280-460°C and keeping the evaporation temperature constant at 630°C. Grazing Incidence X-ray Diffraction (GI-XRD) and X-ray Reflectivity (XRR), were used for structural characterizations. The substrate temperature increase (CdS/ZnO:Al/Glass structure) results in decrease of the microstrain values.