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 SM ISO690:2012MESHALKIN, Alexei, PRISAKAR, Alexandr, TRIDUKH, Ghennadi, ABASHKIN, Vladimir, AKIMOVA, Elena, TSYNTSARU, Natalia. In situ study of chalcogenide thin films growth during vacuum thermal evaporation. In: AIP Conference Proceedings, Ed. 11, 17-21 octombrie 2021, Fethiye. College Park, Maryland: American Institute of Physics Inc., 2023, Vol.2803, p. 0. ISSN 0094243X. DOI: https://doi.org/10.1063/5.0143711 |
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 AIP Conference Proceedings Vol.2803, 2023 |
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Conferința "11th International Advances in Applied Physics and Materials Science Congress and Exhibition" 11, Fethiye, Turcia, 17-21 octombrie 2021 | ||||||
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| DOI:https://doi.org/10.1063/5.0143711 | ||||||
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Film thickness controlling and optimizing growth techniques require in-situ characterization precise methods. They also require the development of feedback control concepts to obtain of thin films with desired thickness. This work describes results on in-situ optical monitoring of chalcogenide film growth processes by thermal vacuum evaporation, where the thin films layer by layer are deposited. The proposed method has been applied for thickness growth evaluation of amorphous chalcogenide glasses multilayers As2S3 and Se and validated by ex-situ postgrowth analysis. |
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