Morphology and luminescence properties of ZnO layers produced by magnetron spattering
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RUSU, Emil, GHIŢU, Irina, PRILEPOV, Vladimir, ZALAMAI, Victor, URSACHI, Veaceslav. Morphology and luminescence properties of ZnO layers produced by magnetron spattering. In: Nanotechnologies and Biomedical Engineering, Ed. 1, 7-8 iulie 2011, Chișinău. Technical University of Moldova, 2011, Editia 1, pp. 128-132. ISBN 978-9975-66-239-0..
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Nanotechnologies and Biomedical Engineering
Editia 1, 2011
Conferința "International Conference on Nanotechnologies and Biomedical Engineering"
1, Chișinău, Moldova, 7-8 iulie 2011

Morphology and luminescence properties of ZnO layers produced by magnetron spattering


Pag. 128-132

Rusu Emil1, Ghiţu Irina1, Prilepov Vladimir2, Zalamai Victor3, Ursachi Veaceslav3
 
1 Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu" of the Academy of Sciences of Moldova,
2 Moldova State University,
3 Institute of Applied Physics, Academy of Sciences of Moldova
 
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Disponibil în IBN: 19 iulie 2019


Rezumat

We show that the morphology and the luminescence properties of ZnO layers produced by magnetron sputtering can be controlled by technological parameters of sputtering, particularly by the ratio of argon to oxygen gases in the gas flow during the growth process. Smooth and flat layers were produced with a high Ar/O ratio, while porous layers with various morphologies were obtained with a low Ar/O ratio. The layers produced with O/Ar ration equal to 10 exhibit extremely high near-bandgap luminescence intensity even higher in comparison with bulk ZnO single crystals. The free carrier density estimated from the analysis of photoluminescence spectra is also very high in these samples suggesting that these technological conditions promote both optical and electrical activation of the doping Al impurity. The samples grown with high Ar/O ratios exhibit strong visible emission which is controlled by the technological conditions.

Cuvinte-cheie
ZnO, magnetron sputtering, morphology, Luminescence, excitonic emission, deep centers